This course introduces how engineering methods are applicable to 'micro-world' and how to fabricate micro-scale machines and devices. Furthermore, students could have basic attainments for work after graduation or for research at graduate course.

This course consists of two main parts. Former part deals with classical MEMS fabrication and devices, and later part deals with MEMS for bio- applications. First of all, students will learn about background of miniaturization technique, semi-conductor technique and nano-technique, and then learn physical laws and scaling technique for micro-/nano- scale. Also students could learn about fabrication techniques and principles, and lastly about mechanisms of those MEMS devices.

※ Prerequisites : Thermodynamics, Fluid mechanics, Solid mechanics, Mechanical dynamics

※ Grading : Midterm & Final Exam (60%), Project (30%), Assignments & Attendance