Syllabus

(강의 계획서 template)

Course Title: Integrated Circuit Processes of Semiconductor

Course number: 445.411               Credits: 3

Professor: Seung-Ki, Joo	Office: 131-307

Contact:  (02)880-7442, skjoo@snu.ac.kr

Attendant:   graduate student

Prerequisite: Modern Physics of Materials, Electric, Magnetic and Optical Properties of Materials, Advanced Integration Technology of Semiconductor

Lecture time:  Mon & Wen 14:30~15:45	Lecture room: 31-310

Assistant: Sung-Hun, Yu

Homepage: http://eml.snu.ac.kr

Office hour: Mon & Wed 11:00-12:00 (by appointment as needed)

Course objectives

-understand the principles of Silicon integrated circuits fabrication

-understand the characteristics and techniques of each fabrication processes

-understand typical problems of eace fabrication processes and solve them

-introduce advanced VLSI and solar cell technologies

Course description

-overview :

This course provides basic knowledge about fabrication processes of Silicon integrated circuits for the students who will study Silicon thin film transistor  as a major. Students can study every Si-TFT fabrication processes(oxidation, diffusion, Ion doping, photo-lithography, metalization, etching, etc. and practice processes design to make a new device.

-application

design and fabrication of Silicon based integrated circuits.

Texts and materials

textbook: Seung-Ki, Joo, Fabrication principles of Silicon based integrated circuits

supplementary text: S. M, Sze, VLSI Technology

Evaluation

mid-term exam       30%

final exam             40%

Quiz + homework     20%

attendance              10%

Results of Course

1. Develop ability to understand the principles of every processes of Silicon based integrated circuits fabrication

2. Develop ability to design practical processes for a new device

3. Develop ability to analyze the problems of processes and solve them

Lecture schedule

week	Topic
1	introduction/overview
2	single crystal growth
3	oxidation
4	oxidation/diffusion
5	diffusion
6	ion doping
7	photo-lithography
8	mid-term exam
9	CVD I
10	CVD II
11	dry etching
12	metalization I
13	metalization II
14	VLSI technology/ solar cell
15	summary
16	final exam