Submitted by admin on Thu, 01/18/2018 - 15:11 c_cosidx: 313topics: Device examples (2)c_lecno: 14c_moddate: 2010-05-27 19:01:39c_orderno: 14files: 6011.pdf (eng)course: Applications of MEMS in Mechanical Engineeringc_noteidx: 3413