Submitted by admin on Thu, 01/18/2018 - 15:11 c_cosidx: 313topics: Device examples (3)c_lecno: 15c_moddate: 2010-05-27 19:01:51c_orderno: 15files: 6012.pdf (eng)course: Applications of MEMS in Mechanical Engineeringc_noteidx: 3414