Comb Actuator - Mechanical Spring and Damping Electrical spring an design of microphone

Submitted by admin on Thu, 01/18/2018 - 16:26
c_cosidx: 
277
c_moddate: 
2010-01-20 20:31:20
c_orderno: 
12
c_weekno: 
12
course: 
Introduction to Microsystem Technology
topics_long: 
Comb Actuator - Mechanical Spring and Damping Electrical spring an design of microphone