Submitted by admin on Thu, 01/18/2018 - 15:11 c_cosidx: 114topics: Lecture 1, 2 (MEMS introduction)c_lecno: 1,2c_moddate: 2008-11-06 23:05:28c_orderno: 1files: 2454.pdf (eng)course: Micro-Electro Mechanical Systems Design & Fabricationc_noteidx: 1284