Micro-Electro Mechanical Systems Design & Fabrication

coursetab

c_lecno	Title	files
1,2	Lecture 1, 2 (MEMS introduction)	2454.pdf
3	Lecture 3 (2005 Term project review)	2455.pdf
4	Lecture 4 (2006 Term project review)	2456.pdf
5	Lecture 5 (Comb resonator Intro)	2457.pdf
6	Lecture 6 (Material Mechanics)	2458.pdf
7	Lecture 7 (Dynamics)	2459.pdf
8	Lecture 8 (Fluidics damping)	2460.pdf
9	Lecture 9 (Photolithography)	2461.pdf
10	Lecture 10 (Oxidation)	2462.pdf
11	Lecture 11 (RIE process)	2463.pdf
12	Lecture 12 (PECVD)	2464.pdf
15	Lecture 15 (2008 design review)	2465.pdf
16	Lecture 16 (LPCVD)	2466.pdf
17	Lecture 17 (Non Si Wet Etch)	2467.pdf
18	Lecture 18 (Non Si Dry Etch)	2468.pdf
19, 20	Lecture 19, 20 (Si Wet Etch)	2469.pdf
21	Lecture 21 (CMOS MEMS part1)	2470.pdf
22	Lecture 22 (CMOS MEMS part2)	2471.pdf
23	Lecture 23 (2008 Term Project Review)	2472.pdf