Submitted by admin on Thu, 01/18/2018 - 15:11 c_cosidx: 114topics: Lecture 5 (Comb resonator Intro)c_lecno: 5c_moddate: 2008-11-06 23:06:15c_orderno: 4files: 2457.pdf (eng)course: Micro-Electro Mechanical Systems Design & Fabricationc_noteidx: 1287