code:
445.411_2008S
level:
year:
term:
staff:
Prof. Joo, Seung Ki
c_regdate:
2008-12-04 12:33:52
department:
Integrated Circuit Processes of Semiconductor
coursetab
| c_weekno | Title | Body |
|---|---|---|
| 1 | introduction/overview | |
| 10 | CVD II | |
| 11 | dry etching | |
| 12 | metalization I | |
| 13 | metalization II | |
| 14 | VLSI technology/ solar cell | |
| 15 | summary | |
| 16 | final exam | |
| 2 | single crystal growth | |
| 3 | oxidation | |
| 4 | oxidation/diffusion | |
| 5 | diffusion | |
| 6 | ion doping | |
| 7 | photo-lithography | |
| 8 | mid-term exam | |
| 9 | CVD I |