Submitted by admin on Thu, 01/18/2018 - 16:26 c_cosidx: 114c_moddate: 2008-11-06 21:25:07c_orderno: 4c_weekno: 4course: Micro-Electro Mechanical Systems Design & Fabricationtopics_long: Comb drive resonator design / Design Lecture 1 (CADENCE)