Submitted by admin on Mon, 01/15/2018 - 11:09 c_cosidx: 114topics: Design Lecture 1_Cadencec_moddate: 2008-11-06 21:30:15c_orderno: 1c_matidx: 129course: Micro-Electro Mechanical Systems Design & Fabricationfiles: 2452.pdf (eng)