Submitted by admin on Thu, 01/18/2018 - 15:11 c_cosidx: 5topics: Device examples (2)c_lecno: 07c_moddate: 2007-05-10 13:22:31c_orderno: 0files: 141.pdf (eng) 142.pdf (eng)course: Applications of MEMS in Mechanical Engineeringc_noteidx: 67