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Applications of MEMS in Mechanical Engineering

coursetab

c_lecno	Title	files
01	Introduction to MEMS	129.pdf, 129.pdf, 129.pdf
01	Introduction to MEMS	130.pdf, 130.pdf, 130.pdf
01	Introduction to MEMS	131.zip, 131.zip, 131.zip
02	Bulk micromachining (1)	132.pdf, 132.pdf
02	Bulk micromachining (1)	133.pdf, 133.pdf
03	Bulk micromachining (2)	134.pdf, 134.pdf
03	Bulk micromachining (2)	135.pdf, 135.pdf
04	Surface micromachining (1)	136.pdf, 136.pdf
04	Surface micromachining (1)	137.pdf, 137.pdf
05	Surface micromachining (2)	138.pdf, 138.pdf, 138.pdf, 138.pdf
05	Surface micromachining (2)	139.pdf, 139.pdf, 139.pdf, 139.pdf
05	Surface micromachining (2)	155.pdf, 155.pdf, 155.pdf, 155.pdf
05	Surface micromachining (2)	156.pdf, 156.pdf, 156.pdf, 156.pdf
06	Device examples (1)	140.pdf, 140.pdf, 140.pdf, 140.pdf
06	Device examples (1)	157.avi, 157.avi, 157.avi, 157.avi
06	Device examples (1)	158.avi, 158.avi, 158.avi, 158.avi
06	Device examples (1)	159.avi, 159.avi, 159.avi, 159.avi
07	Device examples (2)	141.pdf, 141.pdf
07	Device examples (2)	142.pdf, 142.pdf
08	Introduction to BioMEMS	143.pdf, 143.pdf, 143.pdf
08	Introduction to BioMEMS	144.pdf, 144.pdf, 144.pdf
08	Introduction to BioMEMS	145.zip, 145.zip, 145.zip
09	BioMEMS fabrication	146.pdf, 146.pdf
09	BioMEMS fabrication	147.pdf, 147.pdf
10	Microfluidic devices	148.pdf, 148.pdf
10	Microfluidic devices	149.pdf, 149.pdf
11	Detection methods (1)	150.pdf
12	Detection methods (2)	151.pdf, 151.pdf
12	Detection methods (2)	160.avi, 160.avi
13	Device examples (1)

code:

446.355_2006F

level:

year:

term:

staff:

Prof. Suh, Kahp-Yang

c_regdate:

2007-05-10 12:21:09

department:

Mechanical and Aerospace Engineering