code:
445.411_2008S
level:
year:
term:
staff:
Prof. Joo, Seung Ki
c_regdate:
2008-12-04 12:33:52
department:
Integrated Circuit Processes of Semiconductor
coursetab
| c_lecno | Title | files |
|---|---|---|
| 1 | introduction/overview, single crystal growth | 3133.hwp |
| 2 | oxidation | 3134.hwp |
| 3 | diffusion | 3135.hwp |
| 4 | ion doping | 3136.hwp |
| 5 | photo-lithography | 3137.hwp |
| 6 | CVD | 3138.hwp |
| 7 | dry etching | 3139.hwp |
| 8 | metalization | 3140.hwp |
| 9 | VLSI technology/ solar cell | 3142.hwp |
| 10 | summary | 3141.hwp |
| Syllabus | Syllabus | 3143.hwp |