Applications of MEMS in Mechanical Engineering

coursetab

c_lecno	Title	files
1	Introduction to MEMS	5998.pdf
2	Bulk micromachining (1)	5999.pdf
3	Bulk micromachining (2)	6000.pdf
4	Surface micromachining (1)	6001.pdf
5	Surface micromachining (2)	6002.pdf
6	Device examples (1)	6003.pdf
7	Device examples (2)	6004.pdf
8	Introduction to BioMEMS	6005.pdf
9	BioMEMS_fabrication	6006.pdf
10	Microfluidic devices	6007.pdf
11	Detection methods (1)	6008.pdf
12	Detection methods (2)	6009.pdf
13	Device examples (1)	6010.pdf
14	Device examples (2)	6011.pdf
15	Device examples (3)	6012.pdf
16	Class summary	6013.pdf
17	Supplemental to lecture5 - piezoelectric device fab. example	6014.ppt